摘要
采用等离子体增强化学气相沉积技术,以C2H2、H2和N2为反应气体,制备碳纳米管薄膜。利用扫描电镜、透射电镜和拉曼光谱仪对其进行表征。结果表明,碳源气体流量对碳纳米管薄膜的生长起着重要作用,获得分布均匀、密度适中、杂质缺陷少的碳纳米管的最佳碳源流量为30 sccm。
Carbon nanotubes are obtained with acetylene,hydrogen and nitrogen as gases by a technology of plasma enhanced chemical vapor deposition. They were characterized by scanning electron microscopy （SEM）,transmission electron microscope （TEM） and Raman spectrometer. Results show that acetylene flow plays important role in the grown of carbon nanotubes and the optimum hydrogen flow of the carbon nanotubes with uniform distribution, moderate density, little impurity and defect is 30 sccm.
出处
《应用化工》
CAS
CSCD
2013年第3期457-459,共3页
Applied Chemical Industry
基金
陕西省教育厅科研基金资助项目(12JK0989)
陕西省教育科学规划项目(SGH12433)
