摘要
针对目前国内多弧离子镀膜领域存在的智能化水平不高和大颗粒污染问题,我们通过设备改进,增加了可编程逻辑控制器和磁过滤器。以装饰镀膜中常用的二氧化钛膜为研究对象,对比了设备改进前后膜层的性能。X射线衍射测试表明所制备的二氧化钛膜层为金红石相。改进后的设备制备的膜层基本看不到大颗粒的存在,且膜层的绿色更加鲜艳。同时,由于设备的智能化水平提高,使得产品的性能非常稳定,随机抽取的5个样品不论从外观看还是通过反射率测试,性能几乎一样。
The lower intelligent level and large particle pollution are the main questions in the multi-arc ion plating filed of our country. In this paper, the equipment was improved by adding the programmable logic controller and magnetic filter. Taking the commonly used TiO2 film as the research object, the properties of this film were studied. The XRD results show that the TiO2 film is rutile phase. After the improvement of the equipment, the large particle is disappeared and the colour is more brilliant. Moreover, because the intelligent level of the equipment is improved, the repeatability of the product is also improved. For example, the five randomly selected samples have the same appearance and reflectivity.
出处
《真空》
CAS
2013年第2期31-33,共3页
Vacuum
基金
省部产学研结合项目(2010B090400109)
广东省中国科学院全面战略合作项目(2011B090300044)
肇庆特色产业项目(磁控溅射与离子镀联用大型连续式镀膜技术的研发)资助
关键词
多弧离子镀
二氧化钛
大颗粒
multi-are ion plating
TiO2
large particle
