摘要
通过3D扫描的方法,对椭球反光镜的面形进行了检测,并与标准椭球面形进行最佳拟合对比,以E210反光镜为例。结果表明:3D扫描能够完成椭球反光镜的检测,E210反光镜在底孔部位存在加工过量,在端口部位存在近似"十字形"对称的加工不足的现象,加工误差范围为-0.06mm～+0.08mm,符合轮廓度误差±0.1mm的要求。3D扫描点云能够进行逆向反求并建立实际反射面模型,进一步模拟反光镜的反射光斑形状、大小等参数,模拟结果与检测结果一致。
By using 3D scanning detection method, we measured the surface of ellipsoidal reflector and performed the best fitting contrast with the standard ellipsoidal suface-taking E210 reflector as an example. The result shows that the 3D scan detection method is capable of ellip-soidal reflector inspection, and the E210 ellipsoidal reflector is processed excessively on the bottom and insufficiently on the top in an approximate shape like ＂cross＂. The processing error is --0. 06 mm; ＋0. 08 mm, which meets the limited profile error range of --0. 1 mm ＋0.1 ram. We carried out the reverse calculation according to the scanned point cloud data and established an actual reflection surface model, moreover, further simulation of reflector parameters, such as reflecting spot shape and size, was accomplished. The simulation results correspond well to the test result.
出处
《应用光学》
CAS
CSCD
北大核心
2013年第1期117-122,共6页
Journal of Applied Optics
基金
国机集团科研院所技术开发研究专项基金(SINOMACH11科90-21)
关键词
椭球反光镜
3D扫描
面形偏差
光路模拟
ellipsoidal reflector
3D scan
surface error
optical-path simulation
