摘要
针对各领域对光学元件表面粗糙度要求越来越高的现状,在现有微射流抛光技术的基础上,进行了数控光学非球面超光滑加工机床的研制工作。为了设计出最合理的机床结构,首先根据非球面光学元件表面形状特点,在建立了工件与刀具关系数学模型的基础上,分别进行了加工母线和加工导线形状的运动解析,进而进行了运动单元综合,然后完成了运动功能方案设计。随后结合原有浮法抛光机床的结构特点,确定了数控超光滑加工机床总体布局方案。最后进行了超光滑加工机床的详细结构设计,并成功研制了数控超光滑加工机床样机。该样机直线运动轴定位精度为0.008 mm,摆动轴定位精度为0.015 mm,直线运动轴最低速度可达0.01m/s,电主轴最低转速可达30rpm,行程、速度和精度均能够满足直径<200mm球面/非球面光学元件表面超光滑加工的要求。
Aimed at increasingly demanding of all areas of optical components for surface roughness, the computernumerical control （CNC） optical aspheric super-smooth polishing machine was developed based on the existing micro-jet polishing technology. In order to design the most reasonable machine structure, firstly, the mathematical model between work piece and tool was established according to the aspheric optical element surface shape characteristic, and the motion analysis of the polishing generatrix and polishing guide line were carried on separately, then movement units were integrated, and then the movement function design was completed. Then combined with the original float polishing machine structure characteristics, an overall layout scheme of the CNC super-smooth polishing machine was determined. Finally, the super-smooth polishing machine was designed in detail, and a prototype of CNC super-smooth polishing machine was developed successfully. This prototype linear motion shaft positioning accuracy is 0.008 mm, oscillating axis positioning accuracy is 0.015 mm, linear motion shaft minimum speed can reach O.01 m/s, electric spindle minimum speed can reach 30 rpm, stroke, this machine can meet the travel, speed and precision request of the super-smooth polishing for spherical/aspherical surface optical components less than 200 mm in diameter.
出处
《黑龙江大学工程学报》
2012年第4期94-99,共6页
Journal of Engineering of Heilongjiang University
基金
国家科技重大专项项目(2009ZX02205)
关键词
非球面
超光滑加工
运动功能
解析式设计
aspheric surface
super-smoothing polishing
movement function
analytic design
