摘要
A magnetic field sensor based on nano-polysilicon thin films transistors(TFTs) with Hall probes is proposed.The magnetic field sensors are fabricated on <100> orientation high resistivity(ρ>500Ω·cm) silicon substrates by using CMOS technology,which adopt nano-polysilicon thin films with thicknesses of 90 nm and heterojunction interfaces between the nano-polysilicon thin films and the high resistivity silicon substrates as the sensing layers.The experimental results show that when V_(DS) = 5.0 V,the magnetic sensitivities of magnetic field sensors based on nano-polysilicon TFTs with length-width ratios of 160μm/80μm,320μm/80μm and 480μm/80μm are 78 mV/T,55 mV/T and 34 mV/T,respectively.Under the same conditions,the magnetic sensitivity of the obtained magnetic field sensor is significantly improved in comparison with a Hall magnetic field sensor adopting silicon as the sensing layers.
A magnetic field sensor based on nano-polysilicon thin films transistors(TFTs) with Hall probes is proposed.The magnetic field sensors are fabricated on <100> orientation high resistivity(ρ>500Ω·cm) silicon substrates by using CMOS technology,which adopt nano-polysilicon thin films with thicknesses of 90 nm and heterojunction interfaces between the nano-polysilicon thin films and the high resistivity silicon substrates as the sensing layers.The experimental results show that when V_(DS) = 5.0 V,the magnetic sensitivities of magnetic field sensors based on nano-polysilicon TFTs with length-width ratios of 160μm/80μm,320μm/80μm and 480μm/80μm are 78 mV/T,55 mV/T and 34 mV/T,respectively.Under the same conditions,the magnetic sensitivity of the obtained magnetic field sensor is significantly improved in comparison with a Hall magnetic field sensor adopting silicon as the sensing layers.
基金
supported by the National Natural Science Foundation of China(No.61006057)
the Foundation for University Young Key Teacher of Heilongjiang Province,China(No.1251G046)
the Excellent Youth Foundation of Heilongjiang University,China(No.JCL201007)
