摘要
为了提高精密微动平台的定位精度,提出了一种计算微动平台输入耦合位移系数的实验方法。构建显微视觉测量系统,以柔顺铰链式平面三自由度微动平台为研究对象,实时跟踪测量微动平台输入位移;对平台与图像之间的坐标系进行标定,有效提高了平台的输入位移和耦合位移的测量精度。实验表明,基于显微视觉的测量结果与Ansys模拟仿真结果相符,对微动平台的分析与设计具有一定的参考意义。
In order to improve the positioning accuracy of micro-positioning stage,an experimental method is presented to calculate the coupled inputs of a planar 3-DOF micro-positioning stage,which is based on the micro vision.To measure and record the input distance of stage by the micro vision system,a calibration is made between the stage coordinate system and the image coordinate system.All of these are useful for the improvements of coupled inputs precision.Finally, the results of experiment show that,this method has many advantages such as small amount of calculation and high precision of measurement.Besides,it has an important meaning to analyze the structure of micro-positioning stage.
出处
《振动．测试与诊断》
EI
CSCD
北大核心
2013年第1期1-5,161,共5页
Journal of Vibration,Measurement & Diagnosis
基金
国家自然科学基金重大研究计划资助项目(91223201)
国家杰出青年科学基金资助项目(50825504)
NSFC-广东联合基金资助项目(U0934004)
