期刊文献+

严格耦合波收敛层数的研究

Estimation of the number of convergence layers in rigorous coupled-wave analysis
在线阅读 下载PDF
导出
摘要 研究了梯形光栅的结构参数与分层数的关系,通过减少分层数来提高求解光栅衍射效率计算速度。采用开发的软件进行仿真模拟,得到正入射时,TE和TM的收敛层数随着顶宽和周期的增大而减小;TE在占空比小于0.4时,收敛层数随着占空比的增大而减小,之后基本保持不变;TM在占空比为0.5时所需的收敛层数最大,并呈现向两边递减的趋势。结果表明:根据这些规律适当减少分层数可有效提高计算效率。 We studied the relationship between the structure parameters of the trapezoidal grating and the number of layers, aming to provide theoretical basis for improving the speed of calculating grating diffraction efficiency by reducing the number of layers. Simulation with the self-developed software proves that in the normal incident, the number of convergence layers of TE and TM decreases with the increasing top width or period. When the duty cycle is less than 0.4, with the duty cycle increasing the number of convergence layers of TE decreases, and then remains unchanged, but the number of convergence layers maximizes when the duty cycle reaches 0. 5. According to this relationship, the calculation speed can be improved by reducing the number of conver- gence layers appropriately.
出处 《中国科技论文》 CAS 北大核心 2013年第1期58-61,共4页 China Sciencepaper
基金 国家科技重大专项(2011ZX02101-005)
关键词 光栅 分层数 严格耦合波分析 计算效率 grating layer number rigorous couple-wave analysis calculation ef{iciency
  • 相关文献

参考文献10

  • 1Lalanne P,Morris G M. Highly improved convergence of the coupled-wave method for TM polarization[J].Journal of the Optical Society of America A:Optics,Image Science and Vision,1996,(04):779-784.
  • 2Granet G,Guizal B. Efficient implementation of the coupled-wave method for metallic lamellar gratings in TM polarization[J].Journal of the Optical Society of America A:Optics,Image Science and Vision,1996,(05):1019-1023.
  • 3Ma Yuan,Liu Shiyuan,Chen Xiuguo. Estimation of the convergence order of rigorous coupled-wave analysis for OCD metrology[J].PROCEEDINGS OF THE SPIE,2012.M1-M7.
  • 4Niu Xinhui. An Integrated System of Optical Metrology for Deep Sub-micron Lithography[D].California:University of California at berkeley,1999.
  • 5Chen Shuqiang,Li Guoguang. System and method for efficient characterization of diffracting structures with incident plane parallel to grating lines[P].US,7391524,2008.
  • 6曹召良,卢振武,李凤有,孙强,任智斌,赵晶丽.亚波长介质光栅的制作误差分析[J].光子学报,2004,33(1):76-80. 被引量:21
  • 7Loewen E G. Diffraction Gratings Applications[M].New York:Narcel Dekker,Inc,1997.
  • 8樊叔维.任意槽形光栅衍射特性的矢量理论分析与计算[J].光学精密工程,2000,8(1):5-10. 被引量:13
  • 9Moharam M G,Pommet D A,Grann E B. Stable implementation of the rigorous coupled-wave analysis for surface-relief dielectric gratings:enhanced transmittance matrix approach[J].Journal of the Optical Society of America A:Optics,Image Science and Vision,1995,(05):1077-1086.
  • 10Moharam M G,Grann E B,Pommet D A. Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings[J].Journal of the Optical Society of America A:Optics,Image Science and Vision,1995,(05):1068-1076.

二级参考文献8

  • 1Chang K C,J Opt Soc Am,1980年,70卷,7期,804页
  • 2Grann E B,Moharam M G,Pommet D A.Optimal design for antireflective tapered two-dimensional subwavelength grating structures. J Opt Soc Am(A),1995,12(2):333-339
  • 3Grann E B,Moharam M G,Pommet D A.Artificial uniaxial and biaxial dielectrics with use of two-dimensional subwavelength binary gratings.J Opt Soc Am(A),1994,11(10):2695-2703
  • 4Pommet D A,Gran E B,Moharam M G.Effects of process errors on the diffraction characteristics of binary dielectric gratings.Applied Optics,1995,34(14):2430-2435
  • 5Gaylord T K,Moharam M G.Planar dielectric grating diffraction theories.Appl Phys,1982,B28:1-14
  • 6Brāuer R,Bryngdahl O.Electromagnetic diffraction analysis of two-dimensional gratings.Opt Commun,1993,100:1-5
  • 7曹召良,卢振武,张平,等.红外30 μm亚波长抗反射光栅的制作.(待发表) Cao Z L,Lu Z W,Zhang P,et al.Journal of Infrared and Millimeter Waves,(to published)
  • 8鱼卫星,卢振武,王鹏,翁志成.二维表面浮雕结构的矢量衍射分析[J].光学学报,2001,21(8):980-986. 被引量:15

共引文献30

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部