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光学元件一体化精密轴向调整机构的设计 被引量:6

Design of a Monolithic Apparatus for the Fine Axial Adjusting Mechanism of Optical Element
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摘要 为了使光学元件轴向调整机构满足调整行程大、调整精度高、结构紧凑和装调容易等要求,设计了一种一体化结构的光学元件轴向调整机构。结合有限元分析技术,建立了该型机构的参数化模型,并分析了主要设计参数对调整机构的调整行程、一阶固有频率和最大应力值等主要技术指标的影响。分结果表明,调整机构可以实现光学元件的精密轴向调整;柔性转轴片厚度和宽度分别为1mm和0.8mm,柔性导向片的厚度和长度分别为0.6mm和20mm,调整机构的调整量为67.45μm,一阶固有频率为119.1Hz,且机构的最大应力值小于材料的屈服极限。满足光学元件轴向调整机构的设计要求。 An axial adjusting mechanism with monolithic configuration is designed to meet the requirement of large stroke, high precision, compact configuration and convenient alignment for the axial adjustment of optical element. The parameterized finite element model of the axial adjusting mechanism is established. The relation between the main design parameters and specifications of the axial adjusting mechanism such as the stroke, the first order natural frequency and maximum stress is analyzed based on finite element method. Analytic results indicate that the adjusting mechanism is able to regulate the axial position of the optical element. The thickness and width of the flexible pivot are 1 mm and 0.8 mm, respectively. The thickness and length of the flexible guide are 0. 6 mm and 20 mm, respectively. The stroke of the adjusting mechanism is 67 The maximum stress of mechanism is less than yield limit 45 μm and the first order natural frequency is 119.1 Hz Which satisfies the design requirements.
出处 《光学学报》 EI CAS CSCD 北大核心 2012年第F12期261-266,共6页 Acta Optica Sinica
基金 国家重大科技专项02专项(2009ZX02005)资助课题.
关键词 光学器件 轴向调整机构 有限元分析 一体化结构 optical devices axial adjusting mechanism finite element analysis monolithic configuration
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