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微纳制造技术综述 被引量:2

Summary of Micro-nano Manufacture Technology
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摘要 微纳制造技术是当前被世界各国研究人员重视的热点问题。阐述了微纳制造技术的背景和定义,着重介绍了几种典型的微纳制造技术及其应用情况,指出了我国在该领域的不足和发展方向。 Micro-nano manufacture technology is a hot issue researched by various countries' researchers. The authors ex-pounded backgrounds and definition of micro-nano manufacture, and introduced kinds of typical technology of micro-nano manufacture and its application situation. Finally, the authors put forward shortcomings and development direction of China in the field.
出处 《科技创新与生产力》 2012年第12期26-28,共3页 Sci-tech Innovation and Productivity
关键词 微纳制造 微纳结构 加工技术 micro-nano manufacture micro-nano structure processing technology
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