7[4]David S Eddy,Douglas R Sparks.Application of MEMS technology in automotive sensors and actuators[C].Proceedings of the IEEE,1998,86 (8).
8[5]Grace R.MEMS/MST provide updated solutions go many automotive application:the great migration from electromechanical and discrete approaches[J].Mstnews,2002 (10):12-14.
9[6]S Arney.Designing for MEMS reliability[J].MRS Bulletin,2001,26 (4):296-299.
10[7]Ingrid De Wolf.Reliability of MEMS[C].7th International Conference on Thermal,Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems,EuroSimE 2006:1-6.
