摘要
介绍了一种新型的补偿式微压基准,该基准装置的压力测量范围为0～2500 Pa并采用去离子水为工作介质,装置采用超声技术实现两端容器微小液位差的精确测量,同时利用激光干涉技术实现补偿容器移动距离的精确测量,基准装置主要由U型容器系统、伺服驱动系统、超声定位系统、激光测长系统、恒温槽及温度控制系统以及数据采集处理系统组成。
A newly developed micro-manometer covering the pressure range of 0 -2500 Pa for gauge pressure is described. The micro-ma- nometer employs the distilled water as the working medium and is based on the U-type compensated principle. The water level in the two vessels was detected by ultrasonic time of flight measurement, and the displacement of the removable vessel was detected by a laser interferometer. The system composed of U-type vessel configuration, servo-driver system, ultrasonic time of flight measurement system, laser interferometer detection system, thermostat system and data acquisition and processing system.
出处
《计测技术》
2012年第6期41-45,共5页
Metrology & Measurement Technology
关键词
压力计量
压力测量
压力基准
液体压力计
微压计
pressure metrology
pressure measurement
pressure primary standard
liquid manometer
micro-manometer
