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面向NEMS器件的碳纳米管与金属电极电接触研究 被引量:3

Research on Electric Contact between Carbon Nanotubes and Metal Electrodes for NEMS Device
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摘要 改善碳纳米管与金属电极的电接触是实现纳米器件的基础。基于电子隧穿效应的基本原理以及碳纳米管与金属表面接触的模型,得到了两者的接触间隙和接触长度是影响接触电阻的两个重要因素。通过接触电阻测量实验,比较了金电极包覆碳纳米管、钛电极包覆碳纳米管和碳纳米管沉积在金电极上这三种不同接触类型的接触状态,金电极包覆碳纳米管的接触方式具有较小的接触电阻平均值和分散性,接触状态比钛电极包覆碳纳米管和碳纳米管沉积在金电极上两种方式好,其接触电阻平均约为0.062MΩ。 Improving the electric contact between carbon nanotubes and metal electrodes is the basis of re- alizing NEMS device. Based on electrons tunneling effect principle and the contact model between carbon nanotube and metal electrode, both contact clearance and contact length are important factors influencing contact resistance. By testing contact resistances, three contact types including gold coated with carbon nanotubes, titanium coated with carbon nanotubes and carbon nanotubes deposition on gold electrodes were compared in experiment. It indicates that the contact type of gold electrodes coated with carbon nanotube have smaller contact resistance average and dispersion, and be better contact state than titanium electrode coated with carbon nanotube or carbon nanotube deposition on gold electrodes. An average of contact resistance for gold electrodes coated with carbon nanotube is about 0. 062MΩ.
出处 《功能材料与器件学报》 CAS CSCD 北大核心 2012年第5期417-420,共4页 Journal of Functional Materials and Devices
关键词 碳纳米管 电接触 接触电阻 电子隧穿 Carbon nanotube Electrical contact contact resistance electrons tunneling effect.
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同被引文献51

  • 1吴小利,岳涛,陆荣荣,朱德彰,朱志远.碳纳米管的表面修饰及FTIR,Raman和XPS光谱表征[J].光谱学与光谱分析,2005,25(10):1595-1598. 被引量:34
  • 2李萍剑,张文静,张琦锋,吴锦雷.接触电极的功函数对基于碳纳米管构建的场效应管的影响[J].物理学报,2006,55(10):5460-5465. 被引量:7
  • 3张华,谭伟,张振华,陈小华.氟掺杂对碳纳米管场发射特性的影响[J].长沙理工大学学报(自然科学版),2007,4(2):79-83. 被引量:3
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