摘要
针对目前角速度传感器检测维数单一、体积大的缺点,以蜜蜂平衡棒为仿生模型,详细分析了平衡棒的导航原理,结合MEMS技术,设计了一种新型的三维角速度微传感器。利用ANSYS对传感器结构进行仿真、优化,得到了合适的结构尺寸,在±20 V的驱动电压下,传感器结构中的微柱体摆动幅度可达到7.04°,通过进一步理论计算得到翻滚、俯仰角速度产生的哥氏力为2.467×10-5N/(°.s-1),偏航角速度产生的哥氏力为7.58×10-7N/(°.s-1)。
Aiming at the shortcoming of current angular velocity sensor that the dimension of detection is single and the volume always large,we established bionic model based on the bees halter.The navigation principle of its model was analyzed detailedly.Combined with MEMS technology,a novel micro-sensor measuring three-dimensional angular rate was designed.The structure of the MEMS sensor was simulated and optimized by ANSYS,and the appropriate size of the structure was obtained.When the drive voltage is ±20 V,the vibration amplitude of the micro column can reach 7.04°.Through theoretical calculations,the coriolis force produced by the roll and pitch rate is 2.467×10-5N/（°·s-1）,and coriolis force generated by azimuth rate is 7.58×10-7 N/（°·s-1）.
出处
《传感技术学报》
CAS
CSCD
北大核心
2012年第10期1395-1399,共5页
Chinese Journal of Sensors and Actuators
基金
国家973项目(2012CB723404)
