摘要
针对MEMS仿生矢量水听器灵敏度和频带相互制约,不能同时满足宽频带高灵敏度测量的问题,在单个MEMS矢量水听器的基础上,设计了由四个单元构成的2×2单片集成微敏感结构阵列,实现了水听器的高灵敏度和宽频带。通过理论分析和ANSYS仿真分析,确定阵列微结构的尺寸,采用硅微机械加工工艺完成了阵列微结构的加工,最后在水声一级计量站对封装好的水听器进行了灵敏度和指向性校准测试。测试结果表明:该阵列式仿生矢量水听器未加前置放大时灵敏度达到-189 dB,频响范围20～5 000 Hz,具有良好的"8"字型指向性。
The MEMS bionic vector hydrophone, for the mutual restriction of its sensitivity and frequency band, cannot meet the requirements for the measurement of high sensitivity and wide band simultaneously. In order to solve the problem, a kind of 2 × 2 single chip integrated micro sensitive structure array consisting of four units was designed to realize the high sensitivity and wide band of the hydrophone based on a single MEMS vector hydrophone. Then, the size of the micro structure for the array was confirmed through the theoretical and ANSYS simulation analy- sis, and the process for the micro structure for the array was completed by adopting the process technology of the micro-machine. Finally, the test for the sensitivity and directional calibration was conducted for a sealed hydrophone at the underwater acoustic calibration laboratory. The test result indicates that the array type bionic hydrophone without the installment of a preamplifier has the sensitivity of - 189 dB, the frequency range of 20 - 5 000Hz and a good directionality in the shape of ＂8＂.
出处
《微纳电子技术》
CAS
北大核心
2012年第12期790-795,共6页
Micronanoelectronic Technology
基金
国家高技术研究发展计划(863计划)资助项目(2011AA040404)
关键词
高灵敏
宽频带
阵列式
仿生
矢量水听器
频响
指向性
high sensitivity
wide frequency band
array type
bionic
vector hydrophone
fre-quency response
directivity characteristic
