摘要
超硬薄膜能够显著提高材料的关键服役性能。系统总结了超硬薄膜的硬化机制、制备技术以及性能表征方法,分析了制备技术和性能表征方法的优缺点,指出了超硬薄膜研究发展的方向。
Super hard nanocomposite films have been used to improve service behavior of workpiece due to their excel- lent mechanical and chemical properties. The state-of-the-art of harden mechanisms, fabrication technique and property charac- terization of super hard nanoeomposite films were reviewed. The advantages and disadvantages of fabrication technique and prop- erty characterization were analyzed. The developing directions of super hard nanocomposite films were proposed.
出处
《表面技术》
EI
CAS
CSCD
北大核心
2012年第6期99-103,共5页
Surface Technology
关键词
超硬薄膜
制备技术
性能表征
super hard films
fabrication technique
property characterization
