3Griessharrmaer R, Klppl F, Lorenz H, et al. Process for Working up The Residual Gases Obtained In The Deposition Of Silicon And In The Conversion Of Silicon Tetrach loride:美国,4454104[P].1984-06-12.
4Borisova L A, Sysoev S V, Titov V A. Hydrogen Chloride Desorption From The Chlorinated Silane Solutions [J]. Chem Sust Dev, 2006(14): 227-230.
