摘要
采用微波等离子体化学气相沉积法在行波管Al2 O3 夹持杆上沉积金刚石厚膜 ,取代传统有毒的氧化铍陶瓷杆 ,用于宽带大功率行波管改善其散热性能 .经材料性能测试 ,慢波组件装配及性能测试 ,获得了较好的实验结果 :导热率大于 12W/cm .℃ ,介电常数为 5 0～ 5 5 ,介质损耗为 1× 10 -3 ,体积电阻率大于 10 13 Ω/cm ;慢波组件导热性能与同结构的BeO组件相比提高 3 0倍 .整管冷测参数全部合格 ;整管热测在C波段测得Po =95W ,G =35db .
Thick diamond films were synthesized on Al 2O 3 rod using a microwave plasma chemical vapor deposition technique,which can be taken over the traditional BeO rod and used in the wide band high power TWT to improve the heat dissipation greatly.After material tests and evaluation,parts assembly and tests,we′ve got the first good results as follows:Thermal conductivity:>12 W/cm.℃,ten times better than BeO Rod;dielectric constant:ε=5 0～5 5;RF loss:tanδ<1×10 -3 ;resistivity:ρ>10 13 Ω/cm;slow wave parts assembly thermal test:3 0 times better than BeO.The first TWT with diamond rods has passed all cold tests and has got following hot test results:Δf=4～8GHz,Pout=95W,G=35db.
出处
《电子学报》
EI
CAS
CSCD
北大核心
2000年第9期85-87,77,共4页
Acta Electronica Sinica
基金
信息产业部电科院型号预研基金!(No.950 3D0 0 9)
