摘要
简要介绍了电子注分析仪数据采集及控制系统的重要性和基本结构 ,然后着重介绍了该系统的软、硬件设置及其工作原理。
The importance and the structure of data acquisition and control system in Model EBAS I Electron Beam Analyzer are briefly introduced. The hardware, software and the working principle are discussed in detail.
出处
《微细加工技术》
EI
2000年第2期8-12,共5页
Microfabrication Technology
