摘要
在 FTP测量中 ,常利用 π相移方法来消除零频 ,以避免频谱混叠 ,提高 FTP的测量精度。此时 ,测量系统中包含相移装置 ,增加了系统的复杂性。然而 ,人们常常忽略了灰度图中包含的信息在 FTP测量中的作用。本文提出了在 FTP测量中利用一帧灰度图来提高测量精度的方法。该方法测量装置简单 ,又可以达到π相移的效果 ,在实际的 FTP测量中的意义。
In Fourier transform profilometry,π phase shift is often used to eliminate zero frequency for avoiding spectral mixing and overlapping,thus the measuring accuracy can be improved.But a phase shift device is included in the measuring system and the system complexity is increased.However,people often ignore the functions of information included in gray image in Fourier transform profilometry.A method for improving the measuring accuracy by applying a frame of gray image to Fourier transform profilometry is proposed in the paper.The constitution of the measuring device for this method is simple and it can achieve the effect of π phase shift.It is significant in the practical Fourier transform profilometry.
出处
《光电工程》
CAS
CSCD
2000年第3期55-59,共5页
Opto-Electronic Engineering
基金
博士点基金资助项目
关键词
傅里叶变换轮廓术
灰度图
频谱
测量精度
Fourier transform profilometry
Gray image
Spectrum
Measuring accuracy
