摘要
简要讨论了计算机控制应力盘抛光大口径高陡度非球面的基本原理 ,用 Zernike多项式拟合的数学方法研究应力盘工作过程中的面形动态变化 ,对这一方法所能达到的精度进行了分析 ,给出了计算结果。
The basic principle for polishing a large aperture and highly aspherical optical surface with a computer controlled stressed lap is simply discussed.The dynamic change of the surface shape during the operating process of the stressed lap is investigated with a mathematical method of Zernike polynomial fitting,the accuracy of the method is analyzed and the computation results are given.
出处
《光电工程》
CAS
CSCD
2000年第3期20-23,共4页
Opto-Electronic Engineering
基金
中国科学院重点课题
关键词
应力盘
非球面加工
计算机控制
象差
Stressed lap
Aspheric processing
Computer control
Aberration.
