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磁敏元器件及传感器 被引量:3

Magneto Elements and Sensors
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摘要 本文概述了磁敏元器件及传感器的种类和原理,具体分析了强磁性金属薄膜磁敏电阻及传感器的特性、原理及应用,重点介绍强磁性金属薄膜磁敏电阻。 The kinds and functions of magneto elements and sensors are briefly presented. The characteristic, function and application of strong-magneto metallic membrane resistor are exactly described.
出处 《传感器世界》 2000年第6期13-16,共4页 Sensor World
关键词 金属薄膜 磁敏元件 传感器 magneto elements,sensors,metallic membrane
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同被引文献25

  • 1涂有瑞.磁敏传感器产业的现状和发展趋势[J].电子科技导报,1996(10):28-33. 被引量:5
  • 2King D, Rickard A. A resonant MEMS magnetometer[ C ]//The IEE Seminar on MEMS Sensor Technologies,2005:1 --7.
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  • 6Kadar Z. Integrated resonant magnetic field sensor[ D ]. PhD Thesis,Electronic Instrumentation Laboratory, Delft University of technology, The Netherlands, 1997 : 11.
  • 7Eyre B, Pister K S J. Micro-mechanical resonant magnetic field sensor in standard CMOS[ C ]//Proceedings of the 9th International Conference on Solid:State Sensors and Actuators, Chicago, 1997:405 -408.
  • 8Emmefich H, Schofthaler M. Magnetic field measurements with a novel surface micromachined magnetic-field sensor [ J ]. IEEE Transactions on Electron Devices ,2000,47 (5) :972 --977.
  • 9Emmerich H, Schofthaler M, Knaub U. A novel micromachined magnetic-field sensor[ C ]//Proceedings of the IEEE Micro Electro Mechanical Systems(MEMS) ,1999:94 --99.
  • 10King D,Iimited Q. Resonant magnetometer device. England :International Application Published Under the Patent Cooperation Treaty (PCT), International Publication Number WO 2005/ 029107 A1 [ P]. 2005 --03-31.

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