摘要
为了在飞片靶中加入氧化铝隔热层,以提高飞片速度,增大飞片冲击炸药的压力,确保炸药的可靠起爆,利用真空射频磁控溅射法制备了激光驱动复合多层飞片靶中的Al2O3隔热层,在溅射功率238W、溅射气压0.4Pa、Ar气流量30sccm、靶基距11cm条件下,得到Al2O3薄膜的沉积速率为125nm/h,制备的Al2O3薄膜为非晶结构,其表面均匀、致密,没有孔洞等缺陷,为后续复合多层飞片靶的制备提供支持。
The velocity of the flyer can be improved significantly with Al2O3 insulation layer to ensure reliable initiation of high explosives. In this paper, the Al2O3 insulation layer in laser-driven flyer target was prepared by RF magnetron sputtering. In conditions of 238W sputtering power, 0.4Pa sputtering pressure, 30sccm Ar flow and llcm target-substrate distance, the deposition rate of Al2O3 film is 125nm/h. The prepared Al2O3 film is showed amorphous structure by X-ray diffraction （XRD） characterization. The surface of the Al2O3 film is uniform and dense observed by scanning electron microscope （SEM）, and with no holes or other defects. The study provides support to further multi-layer flyer target preparation.
出处
《火工品》
CAS
CSCD
北大核心
2012年第4期15-17,共3页
Initiators & Pyrotechnics
关键词
激光驱动飞片
Al2O3隔热层
制备
磁控溅射
Laser-drivenflyer
Al2O3 insulation layer. Preparation： Magnetronsputtering
