摘要
高能纳秒激光烧蚀硅时,往往会伴随着相爆炸过程,它决定了烧蚀的形貌特征。基于相爆炸的物理过程,分析了相应的烧蚀形貌:相爆炸的发生会使得硅材料发生大范围的去除,高温熔化材料的混合物向外喷溅,冷却形成放射状的冷却条,期间分布着冷却的球状微粒;超热液体的去除部位形成一个类似花瓣状坑,在坑中由于入射光与散射光的干涉形成条纹,其周期与激光光波相似。
In the process of silicon ablation by high energy nanosecond laser, it always goes with the phase explosion, which determinos the ablatiou characteristics. Based on the physical process of phase explosion, the corresponding ablation morphologies has been analyzed： phase explosion can remoral siiicou material in a wide range, the mixture of high temperature molten materials splash outward, then the radial cooling strip and globular particles formed .The ovary - like pit can be produced by the removal of the super hot liquid, and the periodic structures can be found in it,the periodic structures induced by the interference of the incident laser and scattered light, and the periodicity was about 1μm, Milch equal to the incident laser wavelength approximately.
出处
《激光杂志》
CAS
CSCD
北大核心
2012年第5期36-37,共2页
Laser Journal
关键词
纳秒激光
激光烧蚀
单晶硅
相爆炸
Laser ablation
nanosecond laser
mono crystalline silicon
phase explosion
