摘要
对预浓缩气相色谱质谱在半导体洁净室VOC(Volatile Organic compound,挥发性有机化合物)管控中的应用进行了系统的归纳和总结。主要从三个方面的应用进行了讨论:一是洁净室VOC来源确认,二是确认厂务系统处理效率的应用,三是厂务系统处理最终效果的确认。也是实验室分析仪器在半导体行业应用方面的成功范例。
Preconcentrator-GC-MS was used in semiconductor clean room VOC control.Three applications were discussed in this research.The first application was clean room VOC source confirmation,the second application was chemical filter system efficiency test,and the third was the final effect confirmation after chemical filter system installation.This research is a successful example of lab analysis tool application in the semiconductor field.
出处
《电子工业专用设备》
2012年第9期31-34,50,共5页
Equipment for Electronic Products Manufacturing
关键词
预浓缩气相色谱质谱
挥发性有机化合物
洁净室
化学过滤器
Preconcentrator-GC-MS（Preconcentrator-Gas Chromatography-Mass Spectrometer）
VOC（Volatile Organic Compound）
Clean room
Chemical filter
