摘要
为提高步进扫描式光刻机的生产效率,提出了一种具有时间最优和冲击最小的5阶S曲线。在最大扫描速度恒定的前提下,以最小时间和冲击为优化指标,设计了加速时间段内的5阶S曲线。在优化指标冲击力项中引入了可变参数,可以根据加速时间和执行电机进行调整,在光刻机设备允许的范围内缩短加速时间。仿真结果表明,相对于数值方法设计的S曲线,优化S曲线加速时间明显缩短并且加速度曲线平滑。冲击力项系数对加速时间和S曲线的平滑性有很大影响。
To improve the productivity of step-and-scan lithography, a fifth-order S-curve with minimum time and jerk characteristics is proposed. On condition that the scanning speed is a constant, a fifth-order S-curve of the acceleration process is designed based on the minimum time and jerk optimization index. A variable parameter is added to the jerk item of the optimization index and can be adjusted based on acceleration time and actuator motors, and the acceleration time can be induced within the limits of the lithography equipment. Simulation results show that the optimal S-cure can significantly reduce the acceleration time compared with the normal S-curve, and the acceleration curve is smooth. The jerk parameter has a great effect on the acceleration time and smoothness of the S-curve.
出处
《组合机床与自动化加工技术》
北大核心
2012年第9期49-51,55,共4页
Modular Machine Tool & Automatic Manufacturing Technique
基金
国家科技重大专项(2009ZX02207)
关键词
S曲线
时间最优
扫描运动
步进扫描光刻机
S-curve
time optimal
scanning operation
step-and-scan lithography
