摘要
本文对典型的MEMS结构在运动过程中产生和辐射电磁波的机理以及产生的效应进行了研究。基于对MEMS结构的机械、电与电磁的耦合机制的研究,分析了MEMS结构运动过程中产生电磁波的机理。MEMS结构的相对运动以及基板上所携带电荷的运动都可以产生电磁波。在距离电磁波源1 cm处,MEMS结构辐射出的电磁波的频率为100 kHz;当MEMS结构间距为1.5μm,辐射出的电磁波的电场强度为0.45 V/m。产生的电磁波的频率与幅度受到距离,结构运动的频率以及具体形状的影响。本文还考虑了辐射出的电磁波对同一个芯片上其他器件的影响。
Moving structures of MEMS devices can generate and radiate E-M wave.Based on the coupling physics between mechanical,electrical and E-M energy domain,the principles to produce E-M wave have been analyzed,the movement between two MEMS electrostatic structures and the moving charges on the motional MEMS structure.With the distance away from the E-M source is 1cm,the frequency is 100kHz and the gap between the MEMS structure is 1.5μm,the intensity of E-field is 0.45V/m.The E-M wave is influenced by the distance,frequency and the structure of the moving MEMS devices.The influence of the E-M wave to other devices within a chip is also considered.
出处
《传感技术学报》
CAS
CSCD
北大核心
2012年第7期891-896,共6页
Chinese Journal of Sensors and Actuators
基金
National Natural Science Foundation of China(61106114)
关键词
MEMS
电磁波
可动结构
静电荷
MEMS
electromagnetic wave
moving structure
charges
