期刊文献+

纳米压痕法对304不锈钢残余应力的研究(英文) 被引量:8

Study of Residual Stress in the 304 Stainless Steel by Nanoindentation Method
在线阅读 下载PDF
导出
摘要 利用纳米压痕法研究了304不锈钢的残余应力,采用Suresh理论模型恒定载荷时的公式计算残余应力,最大加载载荷依次为500μN、1 000μN、1 500μN、2 000μN、2500μN。结果表明,不锈钢硬度和弹性模量为定值,退火前后的硬度分别为5.3GPa和4.0 GPa,弹性模量分别为110 GPa和100 GPa。利用Ansys分析软件模拟了压痕过程,发现不锈钢在受压过程中有Sink-in现象发生。纳米压痕法测得了未退火不锈钢存在残余压应力,大小为381 MPa;用XRD测得了未退火不锈钢中有350 MPa±23 MPa的残余压应力,两种测量结果吻合良好,说明了纳米压痕法在残余应力测试时的准确性与可靠性。 The residual stress of the 304 stainless steel was investigated by nanoindentation method.The maximum loads were 500 μN,1 000 μN,1 500 μN,2 000 μN and 2 500 μN respectively.The Suresh theoretical model was used to calculate the residual stress.Results showed that the hardness and elastic modulus of un-annealed stainless steel are constant.The hardness of un-annealed and annealed stainless steel is 5.3 GPa and 4.0 GPa and the elastic modulus are 110 GPa and 100 GPa,respectively.Sink-in phenomenon was found during the indentation experiment based on the Ansys software.The compressive residual stress value in the stainless steel(381 MPa)was observed and calculated by the nanoindentation method,which is in good agreement with the result obtained by the XRD method(350 MPa±23 MPa).This agreement demonstrated the accuracy and reliability of using the nanoindentation method for residual stress study.
出处 《传感技术学报》 CAS CSCD 北大核心 2012年第6期766-770,共5页 Chinese Journal of Sensors and Actuators
基金 青年科学基金项目(51005103) 江苏省高校自然科学研究项目(09KJB460001) 江苏大学高级专业人才科研启动基金项目(11JDG059)
关键词 残余应力 304不锈钢 纳米压痕法 residual stress 304 stainless steel nanoindentation
  • 相关文献

参考文献3

二级参考文献29

  • 1Khakpour R, Mansouri S R M,Bahadorimehr A R. Analytical Com- parison for Square,Rectangular and Circular Diaphragms in MEMS Applications[ C]//International Conference on Electronic Devices, Systems and Applications. Kuala Lumpur:2010. 297-299.
  • 2Timoshenko S. Theory of Plates and Shells [ M ]. USA: McGrawHill, 1964.
  • 3Zhou Z M,Zhou Y,Yang C S,et al. The Evaluation of.Young's Modulus and Residual Stress of Nickel Films by Microbridge Test- ings[ J]. Measurement Science and Technolog}', 2004,15 ( 12 ): 2389-2394.
  • 4Liu R,Wang H,Li X,et al. A Micro-Tensile Method for Measuring Mechanical Properties of MEMS Materials [ J ]. Journal of Microme- chanics and Microengineering,2008,18 ( 6 ) :65002-65008.
  • 5Davisa B S, Denison T, Kuang J. A Monolithic High-g SOI-MEMS Accelerometer for Meastlring Projectile Launch and Flight Acceler- ations [ J ]. Shock and Vibration 2006,13 (2) : 127 - 135.
  • 6Dong J, Li X, Wang Y, et al. Silicon Mieromaehined High-Shock Accelerometers with a Cun'ed-Snrface Application Structure for O- ver-Range Stop Protection and Free-Mode-Resonance Depression [ J ]. Journal of Micromeehunies aM Microengineering, 2002, 12 (6) :742-746.
  • 7Xue C, tlu J,Zhang W,et ah Design a High-g Bridge-Type Aceel- eromeler Using GaAs/lnxGal -xAs/A1As Thin Fihns [ C ]//Pro- eeedings of IEEE Int. Conf. on Nano/Miero Engineered and Molec- ular Systems. SatTya : 2008.613 -616.
  • 8Chen W, Liu X, Huo M, et al. Z-Axis Capacitive Aceelerometer with Novel Beams Using SOG Structure [ C ]//Proceedings of IEEE Int. Conf. on Nano/Miero Engineered and Molecular Systems. Zhu- hai :2006.1532-1535.
  • 9Wang Y P,Hsu R Q, Wu C W. Design and Simulation of a MEMS High G Inertial Impact Sensor [ C]//IEEE Sensors Applications Symposium. Atlanta : 2008.95 - 100.
  • 10Mohamed Gad-el-Hak. The MEMS Handbook [ M ]. Boca Raton: CRC Press LLC,2002.

共引文献5

同被引文献149

引证文献8

二级引证文献115

相关作者

内容加载中请稍等...

相关机构

内容加载中请稍等...

相关主题

内容加载中请稍等...

浏览历史

内容加载中请稍等...
;
使用帮助 返回顶部