摘要
针对多晶硅生产中高纯三氯氢硅精馏提纯过程能耗较高的特点,分别将热泵和差压热耦合精馏节能工艺应用到高纯三氯氢硅精馏提纯过程中,并使用Aspen Plus软件对这2种节能工艺进行模拟分析比较,计算得到各工艺流程的能耗,实现了过程的节能和优化。模拟结果表明,热泵和差压热耦合精馏节能工艺对三氯氢硅传统二塔精馏过程均起到了显著的节能效果,其中塔顶蒸汽压缩型、塔釜液闪蒸型热泵精馏过程分别节能66.1%、62.8%,差压热耦合精馏过程节能50.1%。
Due to the property of highly energy consuming in the purification process of high-purity SiHCl3 in polycrystalline silicon production, this study focuses on separately applying two energy saving processes, heat pump and thermally coupled distillation with different pressure, to the purifying distillation process of high-purity SiHCl3. Aspen Plus is used to simulate the two energy saving processes for analysis and comparison. The energy consumptions of both processes are calculated to achieve the goal of energy saving and optimization. The simulation results show that an obvious energy saving effect for the traditional distillation process in SiHC13 production is achieved by applying either heat pump or thermally coupled distillation with different pressure. The vapor recompression and liquid flash heat pump processes allow a save on energy of 66. 1% and 62. 8% respectively. And the process of thermally coupled distillation with different pressure can reach 50. 1% of energy saving.
出处
《现代化工》
CAS
CSCD
北大核心
2012年第9期93-95,共3页
Modern Chemical Industry
基金
长江学者和创新团队发展计划资助项目(IRT0936)
国家科技支撑计划资助项目(2011BAE03B07)
关键词
高纯三氯氢硅
热泵
差压热耦合
节能
ASPEN
Plus模拟
high-purity SiHCl3
heat pump
thermally coupled distillation with different pressure
energy saving
Aspen Plus simulation
