摘要
设计并制备了一种热光聚合物微环谐振腔滤波器。微谐振环采用跑道型结构,通过光束传播法(BPM)对其弯曲半径进行了设计和优化。采用传统的接触式光刻曝光工艺制备了微环谐振腔滤波器并对其进行了光谱测试,实验结果表明,所设计的器件在1 550nm附近的自由光谱范围(FSR)为112pm,消光比约为12.8dB,3dB带宽约为0.026nm,品质因子Q为5.96×104,调制效率是6.13pm/mW;同时测量了器件的响应时间,得到的响应时间约为1.5ms。
A kind of therrnc;optic polymer micro-ring resonator filter is designed and fabricated. A racetrack is used in the micro-ring resonator. By using beam propagation method （BPM）, the bending radius is designed and optimized. The micro-ring resonator is fabricated by using the traditional contact lithography technology. Experiment results show that around the wavelength of 1550 nm,the micro-ring resonator＇s free spectral range, extinction ratio, 3 dB bandwidth, Q factor and modulation efficiency are about 112 pm, 12.8 dB, 0. 026 nm, 5.96 × 10^4 and 6.13 pm/mW, respectively. The response time of the filter is about 1.5 ms.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2012年第9期1727-1731,共5页
Journal of Optoelectronics·Laser
关键词
集成光学
微环谐振腔
热光调谐
调制效率
integrated optics
micro-ring resonator
thermo-optic tuning
modulation efficiency
