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熔石英抛光表面结构的蚀刻和热处理表征 被引量：4

Surface Structure Features of Polished Fused Silica Revealed by Etching and Thermal Treating
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摘要 利用HF蚀刻和热处理,结合原子力显微(AFM)分析,对传统抛光和磁流变抛光的表面结构进行了表征。为了分析热处理凸起的形成源,抛光表面在热处理前分别采用超声清洗、化学沥滤和HF蚀刻三种不同的表面处理技术进行处理,去除了不同表面材料。蚀刻形貌和热处理形貌及其关联性表明,传统抛光表面存在着大量纳米级缺陷,这些缺陷由易于诱导激光损伤的纳米级微裂纹和颗粒状分布的抛光杂质组成。结合抛光机制的分析,建立了传统抛光表面的微裂纹-颗粒杂质结构模型。 The surface structure features of conventional polished and magneto-rheological finishing （MRF） polished fused silica are characterized by HF based etching and thermal treating combined with atomic force microscopy （AFM）. To analyze the source of thermal treating bulges, the polished surfaces are treated by three different surface treatments, namely, ultrasonic cleaning, chemical leaching, and HF etching to remove different materials on/in surface. The surface morphology after etching or thermal treating and their correlations show that there existe high- density nanoscale defects in conventional polished surface. These subsurface defects are composed of nanoscale micro- cracks and grainy impurities, which are easy to induce laser damage. Herein, a micro-cracks and grainy impurities structure model about conventional polished surface is proposed based on the analysis of material removal mechanism of polishing.
作者 杨明红 赵元安 单海洋 易葵 邵建达
机构地区 中国科学院上海光学精密机械研究所强激光材料重点实验室 中国科学院研究生院
出处 《中国激光》 EI CAS CSCD 北大核心 2012年第8期61-68,共8页 Chinese Journal of Lasers
基金 国家自然科学基金(60878045)资助课题
关键词 光学制造 抛光表面结构 HF蚀刻 热退火 退火凸起 纳米级裂纹 optical fabrication polished surface structure HF etching thermal annealing annealing bulges nanoscale micro-cracks
分类号 TG356.28 [金属学及工艺—金属压力加工]
  • 相关文献

参考文献14

  • 1杨明红,赵元安,易葵,邵建达.HF蚀刻+逐层抛光法表征熔石英亚表面损伤层深度[J].中国激光,2012,39(3):88-93. 被引量：8
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二级参考文献13

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共引文献7

同被引文献29

  • 1王永刚,肖正航,王鹏.光学元件离子束抛光去除特性研究[J].航天制造技术,2013(3):8-11. 被引量：5
  • 2Guohang Hu, Shuying Shao, Minghong Yang et al.. Influence of subsurface defects on 355 nm laser damage resistance of monolayer and multilayer coatings [ C ]. SPIE, 2009, 7504.- 75040D.
  • 3Robert Chow, Michael D. Thomas, Robert C. Bickel et al.. Comparison of antireflective coated and uncoated surfaces figured by pitch-polishing and magnetorheological processes[C]. SPIE, 2003, 4932:112-118.
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引证文献4

二级引证文献16

中国激光
2012年 第8期

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