摘要
叙述了复杂结构的大型真空容器氦质谱检漏应用技术 ,分析了其中存在的问题。提出应设置合适的检漏系统。
The helium mass spectrometer leak detecting technology for a large vacuum chamber with the complex construction is described.Some problems in operation are shown and analyzed.And solving methods are given to install suitable detecting systems and decelerate the detecting move and detect complex parts carefully.
出处
《真空与低温》
2000年第2期108-110,共3页
Vacuum and Cryogenics
关键词
氦质谱仪
真空容器
检漏
helium mass spectrometer
leak detection
vacuum
large chamber
