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量块双频激光干涉坐标测量系统的设计

Design of the Gauge Block Measuring System Based on Double-frequency Laser Interference Coordinate Measurement
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摘要 目前,对于尺寸小于300 mm的四等及以下的非标称尺寸量块可以采用高精度万能测长仪测量,而对于尺寸大于300 mm的三等及以下非标称尺寸量块,则没有很好的测量方法。为此,提出了基于坐标测量机的双频激光干涉量块检定系统,对700 mm三等量块进行测量并对校准系统进行不确定度分析。通过与量块附带检定证书和JJG 146-2003量块检定规程的比对,验证了量块检定系统的准确性与可靠性。 With the help of universal high precision length measuring instrument, the non-nominal gauge blocks less than 300 mm of class four or below can be measured, but there is no good method to measure the gauge blocks larger than 300 mm of class three or below. Therefore, the calibration system of gauge block based on double-frequency laser interference for coordinate measuring machine is proposed to measure the gauge blocks of 700 mm of class three and to analyze the uncertainty of calibration system. Through comparing with verification certificate of the gauge block and JJG 146-2003 Verification Regulation of Gauge Block, the precision and reliability of the gauge block calibration system are verified.
作者 姜志华 魏勇
出处 《自动化仪表》 CAS 北大核心 2012年第7期29-31,35,共4页 Process Automation Instrumentation
关键词 传感器信号采集系统量块检定测量精度不确定度 Sensor Signal acquisition system Calibration of gauge block Measuring accuracy Uncertainty
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