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Ti基IrO_2+Ta_2O_5涂层中氧化物附着量的XRF分析 被引量:5

X-Ray Analysis of IrO_2 and Ta_2O_5 Loading in Titanium Based Ir/Ta Mixed Oxides Coatings
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摘要 对传统热解法制得的 Ti基 Ir O2 +Ta2 O5 涂层进行了 X射线能谱 ( EDX)及 X射线衍射 ( XRD)测试分析。结果表明 ,涂层中 Cl元素的含量随温度上升而降低 ,至 5 0 0℃后已降为较低数值 ( 2 % ) ,此温度下 Ir组元几乎以 Ir O2 晶体相存在。Ti基金属的热重分析 ( TGA)表明 ,5 0 0℃下经 4h预氧化后 ,该基体金属已不再氧化增重。结合涂层 EDX、XRD及 Ti基 TGA测试结果 ,确定了 X射线荧光分析 ( XRF )用标准试样的制备条件 ,并同时测定了不同成分及温度所得 Ir O2 +Ta2 O5 涂层中两种氧化物的附着量 。 Titanium based IrO 2+Ta 2O 5 oxides coatings were prepared from chloric salts by thermodecomposition. The coatings were investigated by EDAX and XRD methods. It showed that the content of Cl decreased with incerasing the preparing temperature, and only IrO 2 crystallized phase was observed over 500 ℃. Thermogravimetric analysis (TGA) of metal titanium demonstrated that the weight of the base would not increase apparently after being preoxidized for 4 h .Combining EDAX, XRD and TGA results, preparation conditions of the calibration sample for XRF analysis were determined. The loadings of both IrO2 and Ta 2O 5 in mixed oxide coatings prepared with different composition and temperatures, have been measured by XRF simultaneously. The results coincided with the rominal ones.
出处 《材料保护》 CAS CSCD 北大核心 2000年第4期43-44,共2页 Materials Protection
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