摘要
作者分别用 Sigmund理论和硬球模型求解了溅射输运方程 ,证明了硬球模型的优越性 ,从而大大地扩展了 Sigmund理论的适用范围 (E>10 E0 )。用硬球模型求得了输运方程的一些严格解 ,在单元靶解析解的基础上 ,说明了 L=0、1渐近解的正确性。在双元靶严格解的基础上 。
The author solved sputtering transport equation by using both Sigmund theory and hard sphere model respectively and showed that the superiority of the hard sphere model greatly enlarged the range of validity of Sigmund theory (E>10E 0). For monatomic target, it is shown that the validity of L=0,1 asymptotic solutions. For binary target, it is shown that the preferential sputtering is independent of atomic radius.
出处
《淮南工业学院学报》
2000年第1期63-66,共4页
Journal of Huainan Institute of Technology(Natural Science)
