摘要
微马达是微电子机械系统 (MEMS)的核心器件之一 ,其体积的大小和性能的优劣将直接影响 MEMS的总体品质。本文详细论述了直径 1m m超微马达的设计思想 ,并提出将遗传算法应用于超微马达的参数设计。马达运行结果表明其性能指标与设计基本相符 。
As a crux device in MEMS,the size and property of micromotor will directly affect the performance of MEMS.This paper describes the design of the micromotor with 1mm diameter,and puts forth the application of Genetic Algorithm (GA) in the parameter design of the micromotor.After long time testing,the results shows that it is feasible to apply the GA in the design of parameters of electromagnetic micromotor with 1mm diameter.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2000年第2期163-166,共4页
Chinese Journal of Scientific Instrument
关键词
微电子机械系统
超微马达
遗传算法
约束优化
Micro-Electro-Mechanical Systems (MEMS) Micro-motor Genetic Algorithm Optimization of constraint satisfaction problems
