摘要
单晶硅、锗的超精密车削表面存在明暗相间的分布特征。本文主要对该现象的产生原因进行了研究,认为车削过程中垂直解理面的切削分力的连续变化是产生这种分布特征的主要因素。
The diamond turning surface of single crystal silicon and germanium appears distribution feature alternate with brightness and darkness. The reason of this phenomenon is studied. Continuous changes of cutting component force perpendicular to cleavage plane are found to be main causes of this phenomenon. The measurement result of machined surface microtopography by AFM is shown to be a good agreement with this viewpoint.
出处
《工具技术》
EI
北大核心
2000年第2期22-25,共4页
Tool Engineering
基金
国家自然科学基金
关键词
超精密车削
单晶硅
单晶锗
AFM
表面形貌
Diamond turning , Single crystal silicon, Single crystal germanium , AFM , Surface microtopograghy
