摘要
首先介绍了微能源的几种类型,比较了不同类型微能源的优缺点。振动式微能源具有体积小、重量轻、能量密度高、寿命长、无污染和对环境适应性强等优点,详细描述了静电转换型、电磁转换型和压电转换型三种振动驱动微能源技术的原理和特点。系统综述了三种振动驱动微能源技术的国内外研究现状,包括微能源的结构和采集、存储电路。分析了其存在的技术和应用瓶颈问题,例如微能源使用的材料和结构不完善、转换效率较低、微加工和微装配技术不成熟、难以应用于实际环境、振动环境对其寿命的影响等问题,并且展望了微能源未来的发展趋势。
Different types of the micro power are introduced firstly.The advantages and disadvantages of different types of the micro power are compared.The vibration-driven micro power has the characters of small volume,light weight,high energy density,long life,non-pollution,strong environment adaptation,and so on.The principles and features of three types of the vibration-driven micro power technologies,i.e.the electrostatic conversion,magnetoelectric conversion and piezoelectric conversion micro power are described in detail.The current research situation both at home and abroad for the three types of vibration-driven micro power technologies are summarized systematically,including the structure of the micro power and the collection and storage circuit.The technical and application bottleneck problems are analyzed,including the imperfect micro power structure and materials,the lower conversion efficiency,the immature micromachining and microassembly technology,difficulties in applying to the physical environment,influence of the vibration environment on the service life and what not.Besides that,the future development tendency of the micro power is prospected.
出处
《微纳电子技术》
CAS
北大核心
2012年第4期242-247,共6页
Micronanoelectronic Technology
基金
国家自然科学基金项目(51075374)
关键词
MEMS/NEMS
静电转换
磁电转换
压电转换
微能源技术
MEMS/NEMS
electrostatic conversion
magnetoelectric conversion
piezoelectric conversion
micro power technology
