摘要
以长链甲基三甲氧基硅烷[CnH_(2n)＋1Si（OCH_3）]和正硅酸乙脂（TEOS）两种有机物为起始原料，用溶胶－凝胶法制备出SiC凝胶膜，在Ar气氛下烧结，制备出了SiC膜。初步讨论了溶胶形成过程中水中红键、酸及碱的作用。利用Raman光谱和透射电镜（TEM）结合XPS等测试方法对制得的膜进行了结构、颗粒尺寸及化学成分等的研究，根据分析和观察结果，膜由颗粒尺寸在直径为2nm－4nm，长度为20nm－40nm左右的SiC纳米晶须构成，纯度高，且膜为不均匀孔膜。
It is reported that SiC membrane was synthesized by a sol -gel process derived from the hy-drolysis of a mixture of two organisms on a copper substrate in this paper. The gelmembrane bacame SiCnanostructured rods by heat - treating at 1000 ~ 1300t in an Ar atmosphere in the different temperaturestages, respectively. The size of SiC of high purity in the membrane is about 2 ~4nm of diameter and 40 ~60nm of length. The content of the SiC was 99. 9%. The Raman spectrum of these nanostructured rods inthe membrane is that of crystal SiC The micrograph of the nanostructured rods were observed by usingtransmission etectron microscopy(TEM). The chemical content of the membrane was analysed by XPS. Atlast, The process of the growth mechanism of the SiC nanometersized rods membrane also was discussed atdifferent temperatures.
出处
《陶瓷工程》
2000年第1期4-6,22,共4页
Ceramics Engineering
关键词
纳米晶须
溶胶凝胶法
碳化硅
薄膜
Nanometersized Rods Silicon Carbied Membrane Sol-gel Process
