摘要
金属微电极表面的纳米级处理可以大大提高电极的性能。本文基于微加工及电化学技术在铂微电极位点上制备了一致性良好的氧化铝纳米结构。通过对基片铂层表面等离子体处理,使铝膜与铂层之间粘附力明显增强。利用二次阳极氧化法,在铂微电极位点上制备出纳米孔。结果表明,30V是该条件下比较理想的氧化电压。同时,通过对氧化过程中电流的监测,发现当铝膜完全氧化后电流大幅上升,可将此现象作为终止阳极氧化的标志。这种微电极位点处的氧化铝模板可进一步用于不同材料纳米微电极的制备。
Through the treatment of plasma, the adhesion force became stronger between aluminum film and platinum layer. Then nano-pores were fabricated on platinum layer of the microelectrode site using MEMS technology and the two-step anodization of aluminum deposited on the platinum layer. FE-SEM observations showed that 30V was the suitable voltage under these conditions. Moreover, on the basis of the current-time curve, the current rose quickly when the aluminum film was consumed completely. Furthermore, the porous alumina template can be used for fabricating nano microelectrode.
出处
《化学通报》
CAS
CSCD
北大核心
2012年第2期172-175,共4页
Chemistry
基金
上海市科委09JC1416500
10391901600
1052nm06100项目
浙江省教育厅科研项目(Y200909713)资助
关键词
多孔氧化铝
微电极
铂基
氧化电压
生长机理
Porous aluminum, Microelectrode, Platinum layer, Anodization voltage, Formation mechanis
