摘要
采用溶胶 -凝胶法 ,用醋酸锶、钛酸丁酯、乙醇铌作为前驱体 ,用旋涂法制备掺铌钛酸锶多晶薄膜。用醋酸作为醋酸锶溶剂 ,并用丙三醇作为辅助溶剂 ,溶胶浓度及黏度均可在较大范围内调节。经 6 0 0℃热处理后薄膜转化为钙钛矿结构 ,扫描俄歇电子显微镜所做表面形貌与元素分析表明薄膜均匀、无裂纹、表面光滑、晶粒细小。
In Chinese Nb doped SrTiO 3 thin film of perovskite structure is fabricated by sol gel process Heat treat temperature is over 600 ℃, strontium acetate, titanium terabutoxide, niobium ethoxide are used as starting materials The viscosity of the solution can be controlled more easily by selecting both acetic and glycerol as the solvent of strontium acetate The film is fine, homogeneous, dense, smooth and crack free (6 refs )
出处
《电子元件与材料》
CAS
CSCD
2000年第1期5-6,8,共3页
Electronic Components And Materials
