摘要
MEMS麦克风需要一个高于10V的偏置电压才能工作,这个高电压一般由内部电荷泵电路产生。在传统Dickson电荷泵结构的基础上,提出一种改进的电荷泵结构。它首先将非重叠时钟的幅度加倍,然后用幅度加倍的时钟作为电荷泵的驱动时钟,取得了明显的升压效果。Hspice仿真结果表明,电源电压为1.4V时,6级二极管-电容升压单元就可以实现10.7674V的输出电压。与传统的Dickson升压电路相比,改进型电荷泵的升压单元减少了4级,且其核心部分的面积减小了21%,功耗降低了40%(参考SMIC 0.35μm CMOS工艺)。
MEMS microphone needs a biasing voltage above 10 V,which is usually generated by internal DC-DC pumping circuit.An improved structure of charge pump circuit for MEMS microphone was presented based on Dickson＇s previous works.In this circuit,the amplitude of non-overlapping clocks was doubled to drive the charge pump.The pumping effect for high voltage was very obvious in this way.Results from Hspice simulation showed that the circuit achieved a DC voltage of 10.7674 V with only 6 charge pumping diode-capacitor elements at 1.4 V supply voltage.Compared with traditional Dickson＇s circuit,pumping elements of the improved structure were reduced by 4 stages,and die size and power consumption of the core circuit decreased by 21% and 40%,respectively（in SMIC 0.35 μm CMOS process）.
出处
《微电子学》
CAS
CSCD
北大核心
2012年第1期72-75,共4页
Microelectronics
