摘要
共焦显微技术越来越广泛地应用于微机电系统和半导体器件的三维轮廓测量。设计一种新型采用变焦透镜作为轴向扫描方式的共焦显微系统,利用变焦透镜的焦距变化来代替传统的轴向位移扫描。系统实现了无机械运动的轴向扫描,消除了传统共焦系统中由位移台移动带来的振动,不仅减小了系统的复杂度,而且降低了成本。进一步设计了基于位移台和变焦透镜的两种共焦检测系统,并且对其进行了仿真实验。实验结果表明:基于位移台和基于变焦透镜的共焦系统的聚焦成像和离焦成像结果类似,并且光强的轴向分布曲线也基本相同,表明此方法可行。
The technology of confocal microscope is widely applied in the three-dimensional profile metrology of the micro-electro-mechanical system and semiconductor device. This paper presents a novel confocal microscope system based tunable-focus lens. By utilizing the changeable focal length of this lens instead of the traditional scanning methods in axial displacement, the system can realize scanning in axial direction without mechanical movement and eliminate the vibration caused by the axial scan movement. It can decrease the system complexity, and reduce the cost. A displacement stage based confocal system and a tunable-focus lens based confocal system were designed, and experiments were carried out for the two systems. Experimental results show that the confocal images of in-focus and out-of-focus of the two systems are similar, furthermore, the light intensity distribution along axial direction is basically the same, and that shows this new scan method is feasible.
出处
《应用光学》
CAS
CSCD
北大核心
2012年第1期14-18,43,共6页
Journal of Applied Optics
基金
自然科学基金中德科学中心(GZ 404-303/2)
上海市教委重点学科第5期(J50505)
上海市研究生创新基金项目(JWCXSL1001)资助
关键词
三维轮廓测量
共焦显微镜
轴向扫描
变焦液体透镜
three-dimensional profile metrology
confocal microscope
axial scan
tunable-focus liquid lens
