摘要
利用扫描俄歇微探针的深度分析和线形分析 ,研究了石墨与金属Ti,Cr之间的界面状态和相互作用。研究结果表明 ,样品经真空热处理后 ,在Ti/石墨、Cr/石墨薄膜界面上发生了界面扩散和化学反应 ,生成了TiC和Cr3 C2 等金属碳化物物种 ,促使Ti。
The interface states and interface interaction between graphite substrate and metals (Titanium and Chromium) layers were investigated using AES depth profile and line shape analyses.The results indicated that the interdiffusion at the interface of Ti/graphite and Cr/graphite film occured.Ti and Cr layer reacted with graphite to form TiC and Cr 3C 2 compounds.
出处
《真空科学与技术》
CSCD
北大核心
2000年第1期9-12,共4页
Vacuum Science and Technology
