摘要
通过溶胶凝胶法(sol-gel)研制了NiO-In2O3复合薄膜/锡掺杂玻璃光波导传感元件,并对传感元件的气敏性能进行了研究.实验结果表明,该传感元件对浓度为1×10-4(体积分数)的二甲苯气体具有较好的选择性,在常温下该传感元件能够检测到二甲苯气体的最低浓度是1×10-7(体积分数),所对应的响应及回复时间分别是3和26s,实验相对标准偏差范围是18%±1%.
This paper studied the gas sensitivity of a NiO-In2O3 composite thin film/tin-diffused glass optical waveguide sensor.The sensitive element was synthesized by a sol-gel method.The sensor was fabricated by coating a tin-doped glass optical waveguide with a NiO-In2O3 thin film.The optical waveguide sensor was fixed onto a gas sensor system to detect gaseous volatile organic compounds（VOCs） .The sensor showed high sensitivity towards xylene gas at room temperature;it responded significantly to 1×10-7（volume ratio） of xylene vapor and the response and recovery times were short（less than 3 and 26 s,respectively） .The relative standard deviation of the output light intensity was 18%±1%.
出处
《科学通报》
EI
CAS
CSCD
北大核心
2012年第1期47-51,共5页
Chinese Science Bulletin
基金
国家自然科学基金(20965008)资助
