摘要
本文研究了用热解化学气相沉积方法在硅单晶衬底上制备的金刚石膜对硅衬底的红 外透过率的影响，发现有些金刚石薄膜具有明显的红外增透性质。
In the present paper, the effect of diamond films formed on Si substrate for transparency of Si substrate in infrared wave range has been studied. It is observed that the diamond films with smoother surface have evident reflection reducing property in infrared wave range.
出处
《真空》
CAS
北大核心
1990年第5期21-24,共4页
Vacuum
