摘要
开发了一种基于现场总线的硅片自动装卸控制系统。系统采用PROFIBUS-DP总线和ASI总线相结合的控制方式,实现了PECVD石墨舟硅片的装卸过程自动化,提高了太阳能电池片生产线的生产效率和自动化水平,降低了劳动强度,提高了产品质量。
The control system for auto loading and unloading of solar waferhandling based on fieldbus was presented.Automatic loading and unloading of solar waferhandling of graphite boats of PECVD can be controlled through the control mode which combined with PROFIBUS-DP and ASI.This solution enhanced the efficiency and the automation level of solar cells produce line,reduced the labour intensity,improved the product quality.
出处
《自动化与仪器仪表》
2012年第1期49-50,共2页
Automation & Instrumentation
