摘要
应用交流阻抗谱技术研究了用射频磁控溅射法在Ａｌ２Ｏ３ 基板上制备的ＹＳＺ薄膜电性能。结果表明，在清洁的基板上制备的ＹＳＺ薄膜经６００℃以上热处理后具有较高的电导率，完全可以作为固体电解质使用。
The electric properties of YSZ film on Al 2O 3 substrated by using RF magnetron sputtering have been studied by AC impedence spectra technology.The results indicate that the conductivity of sputtered YSZ thin film treated at 800℃ for 2h is high and would be a good solid electrolyte in high temperature electrochemistry.
出处
《河北理工学院学报》
1999年第4期58-61,共4页
Journal of Hebei Institute of Technology
