摘要
利用微波等离子体化学气相沉积法,在覆盖金属钛层的陶瓷衬底上制备出类球状微米金刚石聚晶膜,后对膜的表面进行氮离子的注入.通过扫描电子显微镜、拉曼光谱、X射线衍射谱及二级结构场发射测试,对膜进行了注入前后的分析.氮离子注入后场致电子发射的效果变强,这可能是氮离子的注入增加了类球状微米金刚石聚晶膜表面的缺陷度,从而增加了价带和导带间的缺陷能级,使电子更容易跃迁到高能级上,提高了场致电子的发射效果.
The globe-like diamond microcrystalline-aggregates were grown by microwave plasma chemical vapor deposition method on ceramic substrate with Ti metal layer. The surface of the carbon film was injected by nitrogen ions. The carbon films were evaluated by Raman scattering spectroscopy, X-ray diffraction spectrum and scanning electron microscopy. The field emission properties of the globe-like diamond microcrystalline-aggregates were discussed. The experimental results showed that the morphology of the film before and after nitrogen ion implantation had slight changes. After ion implantation, the electron emission effect was enhanced. This might be caused by the surface defects created by the nitrogen ion implantation, which would increase the defect density of states in the gap and made it more easily for electrons to jump to a higher level.
出处
《物理实验》
北大核心
2011年第10期8-11,共4页
Physics Experimentation
基金
教育部科学技术重点资助项目(No.205091)
关键词
微波等离子体化学气相沉积
场致电子发射
类球状微米金刚石聚晶
氮离子注入
microwave plasma chemical vapor deposition
field emission
globe-like diamond microcrystalline-aggregate
nitrogen ion implantation
