摘要
利用朗缪尔探针检测射频耦合等离子体特性参数时,测得的伏安特性曲线会受电磁干扰而产生畸变,从而影响等离子体参数的计算和特性分析。为此,利用Savitzky-Golay(SG)滤波算法对伏安特性曲线进行分段滤波,给出平滑效果较好的特性参数。实验结果表明,SG算法对原始信号特征改变较少,求出的电子能量概率函数准确度较高。
While measuring radio frequency plasma＇s parameters by Langmuir probe,the I-V characteristic curve is always distorted by electromagnetic interference,and this influences the parameters calculation and analysis.This paper adopts a Savitzky-Golay（SG） filtering algorithm which is used for smoothing I-V characteristic curve,and this brings accurate parameters.Experimental results show Savitzky-Golay filtering of the divided I-V characteristic can bring low signal distortion rate and high accurate Electron Energy Probability Function（EEPF）.
出处
《计算机工程》
CAS
CSCD
北大核心
2011年第17期220-222,226,共4页
Computer Engineering
关键词
朗缪尔探针
等离子体
伏安特性曲线
SG滤波
电子能量概率函数
Langmuir probe
plasma
I-V characteristic curve
Savitzky-Golay（SG） filtering
Electron Energy Probability Function（EEPF）
