摘要
单点式共焦显微镜由于扫描速度低,光能利用率不高逐渐被多点并行的扫描方式代替。现有的并行扫描方式同样存在一些缺点,限制了测量精度的进一步提高。本文研究了基于数字微镜器件(digital micromirror device,DMD)的多路并行共焦显微镜。利用计算机程序控制DMD芯片上微镜的偏转状态,从而对光源进行调制,形成多路光束,其作用相当于可以控制的虚拟针孔阵列。设计了基于DMD的共焦检测光路,采用分光片的方法解决了由于分光棱镜内表面反射造成的重像干扰问题。对所搭建的光路进行了深度响应曲线测试实验,并且建立了基于DMD的共焦显微镜样机。样机的测量实验结果表明:基于DMD的共焦显微镜不仅具有较高的分辨率,并且具有扫描速度快、测量范围大的优点。
Due to its low scanning speed and poor efficiency of light energy utilization, single-point scanning confocal microscope is gradually replaced by multi-point parallel scanning method. However, there are still some disadvantages in existing parallel scanning method, which limits its further accuracy improvement. This article studies a multibeam parallel scanning method based on Digital Micromirror Device （DMD）. The micromirror is controlled by a computer program and the light source is modulated to form multi-channel light beams, whose function is similar to a mobile virtual pinhole array. A new confocal detecting optical path was designed. Through employing a beamsplitter plate, the problem of double imaging interference caused by the reflection of the inner surface of beamsplitter prism was solved successfully. The depth response curve was extracted from the tomographic images. A prototype confocal microscope based on DMD was built. Experiments on the prototype show that the confocal microscope based on DMD provides not only fast scanning speed and high resolution, but also a large measurement range.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2011年第9期2108-2113,共6页
Chinese Journal of Scientific Instrument
基金
国家自然基金(No.51075280)
上海市教委重点学科第五期(No.J50505)
上海市研究生创新基金(No.JWCXSL1001)资助项目
关键词
共焦检测
数字微镜器件
并行扫描
重像干扰
分光片
confocal inspection
digital micromirror device
parallel scanning
double imaging disturbance
beamsplitter plate
